1 华东师范大学 电子工程系, 上海 200241
2 上海集成电路研发中心， 上海 201210
针对3 nm环栅场效应晶体管，提出了一种射频小信号等效电路模型及基于有理函数拟合的解析模型参数提取方法。首先，在关态条件下提取不受偏置影响的非本征栅/源/漏极电阻、栅到源/漏电容、衬底电容和电阻。然后，在不同偏置条件下提取受偏置影响的本征模型参数。使用Sentaurus TCAD和Matlab对器件进行仿真并拟合得到相关参数，在ADS中验证等效电路模型。结果表明，在10 MHz~300 GHz频率范围内，TCAD仿真与等效电路仿真S参数的最大误差低于269%，证实了所建立模型及建模方法的准确性。该项研究成果对射频集成电路设计具有参考价值。
环栅器件 小信号等效电路 参数提取 射频IC gate-all-around device small signal equivalent circuit parameter extraction RF IC
Author Affiliations
Abstract
1 Tianjin Key Laboratory of Micro-scale Optical Information Science and Technology, Institute of Modern Optics, Nankai University, Tianjin 300350, China
2 State Key Laboratory of Crystal Materials, Shandong University, Jinan 250100, China
3 Shandong Provincial Engineering and Technical Center of Light Manipulations & Shandong Provincial Key Laboratory of Optics and Photonic Device, School of Physics and Electronics, Shandong Normal University, Jinan 250358, China
4 Tianjin Key Laboratory of Optoelectronic Sensor and Sensing Network Technology, Tianjin 300350, China
We report an interesting study of electric-field-induced transformation from a single domain ferroelectric state to the multiple domain ferroelectric state in a KTa1-xNbxO3 (KTN) crystal. Experimental results obtained using the confocal μ-Raman spectroscopy confirm the dynamic change of lattice structures induced by an external electric field. Furthermore, the dependence of relative permittivity on the applied voltage also indicates the transformation of ferroelectric states involving the processes of splintering, inversion, and re-formation of ferroelectric domains.
KTN ferroelectric state domain state transformation field-induced phenomenon Chinese Optics Letters
2021, 19(11): 111602
Author Affiliations
Abstract
1 Tianjin Key Laboratory of Optoelectronic Sensor and Sensing Network Technology, Institute of Modern Optics, Nankai University, Tianjin 300071, China
2 Hubei Key Laboratory of Low Dimensional Optoelectronic Materials and Devices, Hubei University of Arts and Science, Xiangyang 441053, China
3 Advanced Materials Institute, Qilu University of Technology (Shandong Academy of Sciences), Jinan 250014, China
4 Shandong Provincial Engineering and Technical Center of Light Manipulations & Shandong Provincial Key Laboratory of Optics and Photonic Device, School of Physics and Electronics, Shandong Normal University, Jinan 250358, China
In this Letter, we report the existence and relaxation properties of a critical phenomenon on called a 3D super crystal that emerges at T = TC ? 3.5°C, that is, in the proximity of the Curie temperature of a Cu:KTN sample. The dynamics processes of a 3D super crystal manifest in its formation containing polarized nanometric regions and/or polarized clusters. However, with strong coupling and interaction of microcomponents, the characteristic relaxation time measured by dynamic light scattering demonstrates a fully new relaxation mechanism with a much longer relaxation time. As the relaxation mechanism of a relaxator is so-far undetermined, this research provides a novel perspective. These results can help structure a fundamental theory of ferroelectric relaxation.
KTN relaxation time dynamic light scattering micronano structure Chinese Optics Letters
2020, 18(2): 021901
1 中国科学院 光电技术研究所， 成都 610209
2 中国科学院 研究生院， 北京 100049
针对现有530 mm能动磨盘的检测系统(有效检测口径420 mm)，系统分析了检测过程中的球头误差、传感器安装角度误差和坐标定位误差，并给出了各项误差对检测精度的影响。同时，还针对检测基座不完全水平的问题建立模型，应用最小二乘法实现了检测数据的去倾斜处理。给出了实测数据去倾斜前后和误差补偿前后的检测精度对比情况，结果表明去倾斜算法能较好地还原实测数据，补偿检测中的系统误差有助于提高检测精度。
能动磨盘 变形检测 误差分析 去倾斜 误差补偿 active lap deformation measurement error analysis tilt removing error compensation
